Integral method:

D. Maystre and E. Popov: “Integral method for gratings,” in Gratings: Theory and Numeric Applications (Institut Fresnel, PUP, 2012), Ch.4, 4.1-4.58 www.fresnel.fr/numerical-grating-book

E. Popov, B. Bozhkov, D. Maystre, and J. Hoose: "Integral method for echelles covered with lossless or absorbing thin dielectric layers," Appl. Opt. 38, 47-55 (1999) pdf

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