{"id":717,"date":"2024-05-23T10:28:17","date_gmt":"2024-05-23T08:28:17","guid":{"rendered":"https:\/\/www.fresnel.fr\/wp\/?post_type=dimabio&#038;p=717"},"modified":"2025-01-06T16:29:51","modified_gmt":"2025-01-06T15:29:51","slug":"metrologie-des-dimensions-critiques-scatterometrie-et-developpements-avances","status":"publish","type":"dimabio","link":"https:\/\/www.fresnel.fr\/wp\/dimabio\/thematiques\/sondage-et-analyse-non-destructifs-de-materiaux-mineraux\/metrologie-des-dimensions-critiques-scatterometrie-et-developpements-avances\/","title":{"rendered":"M\u00e9trologie des dimensions critiques : scatterom\u00e9trie et d\u00e9veloppements avanc\u00e9s"},"content":{"rendered":"<p style=\"text-align: left;\">L\u2019analyse de la lumi\u00e8re diffract\u00e9e par des structures sub-longueur d\u2019onde permet de reconstruire la forme et la composition de la structure. C<img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-2002 alignright\" src=\"https:\/\/www.fresnel.fr\/wp\/wp-content\/uploads\/2024\/07\/dimabio-th02.jpg\" alt=\"\" width=\"120\" height=\"116\" \/>ette reconstruction n\u00e9cessite la combinaison d\u2019une mesure ellipsom\u00e9trique pr\u00e9cise du champ diffract\u00e9, de calculs \u00e9lectromagn\u00e9tiques rigoureux et d\u2019une m\u00e9thode d\u2019inversion. Cette technique est depuis peu utilis\u00e9e dans l\u2019industrie de la micro\u00e9lectronique o\u00f9 elle remplace avantageusement la microscopie \u00e9lectronique \u00e0 balayage pour la m\u00e9trologie de dimensions critiques.<\/p>\n","protected":false},"author":7,"featured_media":0,"parent":718,"menu_order":22,"template":"","thematique":[24],"class_list":{"0":"post-717","1":"dimabio","2":"type-dimabio","3":"status-publish","5":"entry"},"acf":[],"lang":"fr","translations":{"fr":717,"en":1823},"pll_sync_post":[],"_links":{"self":[{"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/dimabio\/717","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/dimabio"}],"about":[{"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/types\/dimabio"}],"author":[{"embeddable":true,"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/users\/7"}],"version-history":[{"count":0,"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/dimabio\/717\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/dimabio\/718"}],"wp:attachment":[{"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/media?parent=717"}],"wp:term":[{"taxonomy":"thematique","embeddable":true,"href":"https:\/\/www.fresnel.fr\/wp\/wp-json\/wp\/v2\/thematique?post=717"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}